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Low-pressure plasma system
V55-G

Standard system for activating, cleaning, coating and etching

The system is installed in a 19″ cabinet equipped with castors and feet. It can be used for the surface treatment processes of cleaning, activating, etching and coating.

V55-G low-pressure plasma system

Data sheet

System type 19" cabinet
Chamber dimensions (W x D x H) 400 x 460 x 340 mm
Microwave power 100-1.200 W
Gas inlets with mass flow control 2
Electrical connection 230/400 V, 50/60 Hz
Connected load (without pump) 2.2 kVA
System dimensions (W x D x H) 670 x 900 x 1,850 mm

Options

Additional gas inlets 2
Other excitation frequencies (40 kHz, 13.56 MHz)
Soft start / soft ventilation
Microwave coupling from the side
Turntable
Rotary drum
Door pull-out
Automatic door opening

System properties

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