Low-pressure plasma system
V15-G
Standard system for activating, cleaning, coating and etching
The system is installed in a 19″ cabinet equipped with castors and height-adjustable feet. A fully-fledged PLC control system is used to store presettable processes with different parameters.
Low-pressure plasma system V15-G
Data sheet
| System type | 19" cabinet |
| Chamber dimensions (W x D x H) | 250 x 250 x 250 mm |
| Microwave power | 100-600 W |
| Gas inlets with mass flow control | 1 |
| Electrical connection | 230/400 V, 50/60 Hz |
| Connected load (without pump) | 1.5 kVA |
| System dimensions (W x D x H) | 670 x 900 x 1,850 mm |
Options
| Additional gas inlets | 3 |
| Other excitation frequencies (40 kHz, 13.56 MHz) | |
| Soft start / soft ventilation | |
| Microwave coupling from the side | |
| Turntable | |
| Rotary drum | |
| Door pull-out | |
| Automatic door opening |
System properties
- USB connection
- Ethernet interface
- Remote maintenance (VPN)
- Microwave excitation (2.45 GHz)
- Swing door
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