Low-pressure plasma system
V80-G-Side
Standard system for activating, cleaning, coating and etching
The V80-G-Side system is suitable for both industrial production and laboratory use in research and development. A fully-fledged PLC control system is used to store presettable processes with different parameters.
V80-G-Side low-pressure plasma system
Data sheet
| System type | 19" cabinet |
| Chamber dimensions (W x D x H) | 400 x 500 x 430 mm |
| Microwave power | 100-1.200 W |
| Gas inlets with mass flow control | 2 |
| Electrical connection | 230/400 V, 50/60 Hz |
| Connected load (without pump) | 2.2 kVA |
| System dimensions (W x D x H) | 850 x 900 x 1,850 mm |
Options
| Additional gas inlets | 2 |
| Other excitation frequencies (40 kHz, 13.56 MHz) | |
| Soft start / soft ventilation | |
| Microwave coupling from the side | |
| Turntable | |
| Rotary drum | |
| Door pull-out | |
| Automatic door opening |
System properties
- USB connection
- Ethernet interface
- Remote maintenance (VPN)
- Microwave excitation (2.45 GHz)
- Swing door
You need more
information?
Contact us and let us work together to develop solutions that meet your requirements. We look forward to hearing from you and helping you further.