Flexible low-pressure sintering process
The modular sintering system SIN 50+ is a highly flexible platform that meets production requirements from laboratory operation
to series production. Thanks to its modular design, it can be configured either as a batch system or
as an automated inline system, consisting of optional preheating and cooling modules.
The system was developed as a cost-effective solution for processing modern low-pressure sintering materials and
diffusion soldering materials. In addition to standard die sintering with the Softtool, it supports
advanced applications such as multilayer sintering with the Softtool, die or clip sintering with hard stamps
and diffusion soldering of power modules.
In the vacuum chambers, the substrate temperature, gas pressure and gas composition can be precisely controlled during the entire
heating, sintering and cooling process. Copper oxidation can be effectively minimized. In particular,
the use of formic acid or forming gas enables the in-situ deoxidation of copper surfaces
before and after sintering.
Creating or maintaining oxide-free surfaces is crucial, as clean and reactive interfaces improve the
sinterability of silver and copper materials and ensure a high-quality surface finish.
The combination of dynamically adjustable press force and flexible tool design offers the necessary
versatility to realize a wide variety of sintering and joining processes for different package designs.
SIN 50+
System properties
- Dynamically adjustable pressing force: ≤ 500 kN
- Process area: 350 mm × 280 mm
- Precise management of the process atmosphere (N2, N2/H2, HCOOH)
- Temperature range: up to 350 °C
- Hermetically sealed process chambers
- Process control and traceability
- Operation via touch screen
- Internationally patented
- Dynamically controlled and monitored pressure ramps
- High flexibility thanks to quickly interchangeable pressing tools (soft tool, hard stamping tool, diffusion soldering tool)
- Pressure range: 0.1-1,200 mbar
- System-integrated process heating
- Programmable, monitored temperature profiles
- Integrated MES interface (e.g. SECS/GEM)
- Modular design with flexible expansion options
Options
- Preheating and/or cooling modules
- Other process area sizes on request
- Customized automation
Further sintering plants
SIN 20
Vacuum-assisted, compact sintering system SIN 20 for small series production in R&D or laboratory applications
SIN 100 Multi Drive
The flexible and fully automated SIN 100 Multi Drive sintering system for sintering molded packages on heat sinks in volume production
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