Low-pressure plasma system V6-G

Standard system for activation, cleaning, coating, etching

Efficient tabletop system

The standard system V6-G is designed as a tabletop unit for industrial small series production as well as for the low-pressure plasma treatment in R&D laboratories. It can be used for the surface treatment processes cleaning and activation.

The integrated professional PLC control serves as a storage for definable processes and parameters.

Low-pressure plasma system V6-G

Data sheet

Type of system	Tabletop unit
Dimensions of the chamber (W x D x H)	170 x 200 x 170 mm
Microwave power	50-300 W
Gas inlets with mass flow control	1
Power supply	230 V, 50/60 Hz
Power input (without pump)	0.5 kVA
Dimensions of the system (W x D x H)	640 x 710 x 710 mm

Options

Additional gas inlets	2
Additional excitation frequencies (40 kHz, 13.56 MHz)	–
Soft start / slow vent
Lateral microwave feed-in
Rotary table	–
Rotary drum
Pullout door	–
Automatic door opening	–

System features

• USB port
• Ethernet interface
• Remote maintenance (VPN)
• Microwave source (2.45 GHz)
• Swing door